Lithography
Stefan Landis
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
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ISBN-10: 1-118-62123-9
ISBN-13: 978-1-118-62123-3
Язык книги: en
Возрастные ограничения: 0+
Издательсто:
John Wiley & Sons Limited
Категория:
Техническая литература